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1.112 PSL WaferversusINS 3000 DUV Defect

KLA 1.112 PSL Wafer, KLA INS 3000 DUV Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1.112 PSL WaferKLA
INS 3000 DUV DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer transport check
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferKLA INS 3000
Specifications
ConfigurationNIST Traceable[1]Auto Focus check for each lens[3]
Wafer Size8 inch[1]8 inch[3]
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
Wafer size—Wafer transport check[3]
Stage—Slight left-to-right tilt observed; minor scratches present[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing