Comparison ledger
KLA 1.112 PSL Wafer, KLA Candela 8720 Surface Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Candela |
| Specifications | ||
| Configuration | NIST Traceable[1] | Optical System Unit[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Single Wafer Loading | — | Automatic Transfer by Wafer Transfer Robot[3] |
| Wafer Thickness Detection | — | Laser Transmission Thickness Detection Module (DTD), Laser Diode 660 nm[3] |
| CPU | — | XEON E5-2620 2.0 GHz, 20 MB cache[3] |
| HDD | — | 3TB[3] |
| Network Card | — | Ether Network Card[3] |
| Monitor | — | 19 inch LCD Monitor[3] |
| Pointing Device | — | Optical Trackball[3] |
| Wafer Sizes | — | 2 inch[3] |
| Laser Light Source | — | 405 nm Laser Diode; 660 nm Laser Diode[3] |
| Detection Channel | — | Scatter (Oblique, Normal); Specular; Topography; Phase; PL (Option)[3] |
| Transfer Unit | — | Single Wafer Loading; Automatic Transfer by Wafer Transfer Robot[3] |
| Operating System | — | Microsoft Windows Server 2008 Operating system (English Version)[3] |
| Application Software | — | Candela 8720 Application Software, Version 10[3] |
| Custom Specifications | — | Transformer for stepping up the power supply voltage from 200 V to 230 V[3] |
| Candela 8720 Application Software | — | Version 10[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →