Comparison ledger
KLA 1.112 PSL Wafer, KLA 2133 Brightfield, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Wafer Transfer |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA 21xx |
| Specifications | ||
| Configuration | NIST Traceable[1] | 2 x 25 Auto Load[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Wafer size | — | Wafer Transfer[3] |
| Process Vac | — | 23 InHg[3] |
| Inlet Power | — | 3 line of 208 Vac 20 Amp[3] |
| CDA | — | 100 PSI[3] |
| Exhaust for Cooling | — | Blower[3] |
| OEM | — | KLA[3] |
| Model | — | 2133 Brightfield[3] |
| Category | — | Metrology & Inspection[4] |
| Wafer handling | — | Cassette Transfer[4] |
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