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Comparison ledger

0035235-003 MMD HeadversusAFT-6100

KLA 0035235-003 MMD Head, Nanospec AFT-6100, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
AFT-6100Nanospec
OEMKLANanospec
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadNanospec AFT-6100
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]—
Model0035235-003[1]—
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Equipment category—Metrology; optical measurement[2]
Facility listing—Listed in the EPFL Center of MicroNanoTechnology (CMi) equipment portfolio under optical measurement[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]epfl.chepfl.ch