Comparison ledger
KLA 0035235-003 MMD Head, KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Bare wafer inspection station |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2011– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | KLA Surfscan |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | HDD not included[2] |
| Model | 0035235-003[1] | — |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Wafer size | — | Bare wafer inspection station[2] |
| Illumination | — | Deep-ultraviolet (DUV)[2] |
| Wafer loading unit ports | — | 3[2] |
| Haze maps | — | Full-wafer high-resolution[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →