Waferpedia

Comparison ledger

0035235-003 MMD HeadversusINS 3000 Macro Defect

KLA 0035235-003 MMD Head, KLA INS 3000 Macro Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
0035235-003 MMD HeadKLA
INS 3000 Macro DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA INS 3000
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]No HDD[2]
Model0035235-003[1]INS 3000[2]
MakeKLA[1]KLA / Leica[2]
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Loading Configuration—SMIF[2]
Number of Cassette Stations—1[2]
Leica INS Series—INS-3000[2]
Microscope Objective Sizes—NA[2]
Wafer size—8 inch[2]
Series—INS-3000[2]
Cassette stations—1[2]
DIC—No[2]
ADC—No[2]
OCR—No[2]
0035235-003 MMD Head entryINS 3000 Macro Defect entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing