Waferpedia

Comparison ledger

0035235-003 MMD Headversus2133 Brightfield

KLA 0035235-003 MMD Head, KLA 2133 Brightfield, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer Transfer
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA 21xx
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]2 x 25 Auto Load[2]
Model0035235-003[1]2133 Brightfield[2]
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Wafer size—Wafer Transfer[2]
Process Vac—23 InHg[2]
Inlet Power—3 line of 208 Vac 20 Amp[2]
CDA—100 PSI[2]
Exhaust for Cooling—Blower[2]
OEM—KLA[2]
Category—Metrology & Inspection[3]
Wafer handling—Cassette Transfer[3]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com