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Comparison ledger

3 NS 411 B F 003 Atmospheric Wafer Robotversus1 DP 41

Kawasaki 3 NS 411 B F 003 Atmospheric Wafer Robot, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
OEMKawasakiLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKawasaki 3 NS 411 B F 003 Atmospheric Wafer RobotLogitech 1 DP 41
Specifications
ConfigurationAMAT 12" CMP[1]50/60 Hz[3]
Equipment TypeAtmospheric Wafer Robot[1]—
Wafer Size12 inch[1]—
CategoryCMP[2]—
ManufacturerKawasaki[1]—
Model3 NS 411 B F 003[1]1 DP 41[3]
Phase—3 Phase[3]
Voltage—480 V[3]
Make—Logitech[3]
Frequency—50/60 Hz[3]
Current—12 amps[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing