Comparison ledger
Kawasaki 3 NS 411 B F 003 Atmospheric Wafer Robot, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 12 LapperLapmaster | |
|---|---|---|
| OEM | Kawasaki | Lapmaster |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Kawasaki 3 NS 411 B F 003 Atmospheric Wafer Robot | — |
| Specifications | ||
| Configuration | AMAT 12" CMP[1] | — |
| Equipment Type | Atmospheric Wafer Robot[1] | — |
| Wafer Size | 12 inch[1] | — |
| Category | CMP[2] | — |
| Manufacturer | Kawasaki[1] | — |
| Model | 3 NS 411 B F 003[1] | — |
| Outside plate diameter | — | 12 inches[3] |
| Lapping Speed Range | — | 0 to 60 rpm[4] |
| Wafer Size Compatibility | — | 4 inches or smaller[3] |
| Input Voltage | — | 110 V[3] |
| Frequency | — | 60 Hz[3] |
| Phase | — | 1[3] |
| Number of Rings | — | 3[3] |
| Number of Weights | — | 3[3] |
| Includes Slurry System | — | Yes[3] |
| Includes Timer | — | Yes[3] |