Comparison ledger
Hitachi SU8230, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU8230Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi SU8230 | KLA 0035235-003 MMD Head |
| Specifications | ||
| Role | Cleanroom scanning electron microscope (SEM)[1] | — |
| Facility reference | SEM-10[1] | — |
| Manufacturer | Hitachi[1] | — |
| Model | SU8230[1] | 0035235-003[2] |
| Training prerequisite note | Qualification on the SEM-10 Hitachi SU8230 is a prerequisite to SP-4 training and access.[1] | — |
| Configuration | — | TSTD PCB ASSY, MMD MEAS HEAD[2] |
| Make | — | KLA[2] |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[2] |
| Compatible System | — | KLA AIT-XP[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →