Comparison ledger
Hitachi SU 8030 FEG-SEM, LEO 1550, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 8030 FEG-SEMHitachi | 1550LEO |
|---|---|---|
| OEM | Hitachi | LEO |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 4" | 4" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi SU | LEO 1550 |
| Specifications | ||
| Configuration | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[1] | — |
| Wafer size | 4" Wafer Holder for SU8030/SU8040[1] | — |
| Stage | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[1] | — |
| Detector System | Triple Electron Detector System w/ Super ExB[1] | — |
| Specimen Airlock | 6" Specimen Exchange Airlock[1] | — |
| Beam Deceleration | Beam Deceleration System[1] | — |
| Vacuum System | TMP Dry Vacuum System[1] | — |
| EDS Integration | EDS Ready with DBC (P/N536-9805) and RS-232 Interface (P/N536-9807)[1] | — |
| Operating System | Windows XP[1] | — |
| Safety Compliance | UL and S2-02 Safety Compliance[1] | — |
| Section | — | FIB / SEM / EDX / ProSEM[2] |
| Sample holders | — | 4 Inch Wafer, 6 Inch Wafer, 6 Inch Mask[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →