Comparison ledger
Hitachi S 9200, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9200Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9200 | KLA 1.112 PSL Wafer |
| Specifications | ||
| Configuration | the Robot needs service for a handling issue[1] | NIST Traceable[4] |
| Wafer Size | 8 inch[1] | 8 inch[4] |
| Tool Type | CD-SEM (Critical Dimension Scanning Electron Microscope)[2] | — |
| Original operating system | Unix[3] | — |
| Upgrade operating system | Linux[3] | — |
| Workstation models (original) | B132L, B132L+, B180L, B2600[3] | — |
| Software version range (original) | 11 to 15[3] | — |
| OEM | Hitachi[1] | — |
| Model | S 9200[1] | — |
| Equipment type | SEM (Scanning Electron Microscope)[1] | — |
| Wafer sizes | 8 inch[1] | — |
| Alternate designation | S9200[2] | — |
| Applicable software version | 11 to 15[3] | — |
| Workstation model | B132L, B132L+, B180L, B2600[3] | — |
| NIST Traceable | — | True[4] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →