Waferpedia

Comparison ledger

S 2150versus0035235-003 MMD Head

Hitachi S 2150, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
S 2150Hitachi
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 2150KLA 0035235-003 MMD Head
Specifications
CategoryMetrology & Inspection[1]—
TypeSEM (Scanning Electron Microscope)[2]—
Vintage2007[2]—
Configuration—TSTD PCB ASSY, MMD MEAS HEAD[3]
Model—0035235-003[3]
Make—KLA[3]
Part Description—TSTD PCB ASSY, MMD MEAS HEAD[3]
Compatible System—KLA AIT-XP[3]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing