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Kokusai VR 120 S Resistivityversus1007

Hitachi Kokusai VR 120 S Resistivity, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMHitachiKLA
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi Kokusai VR 120 S ResistivityKLA 1007
Specifications
ManufacturerHitachi[1]KLA[4]
ModelVR 120 S (also VR-120S)[1]1007[4]
Measurement type4-point resistivity / sheet resistance[2]—
Wafer size2 to 12 inch[2]150 mm[4]
CategoryTest & Probe[3]—
ApplicationsElectronic properties[2]—
Description—Wafer Prober[4]
Convertible to 8 inch wafer size—Yes[4]
Vintage—01.06.1995[4]
Make—KLA[5]
Equipment type—Prober[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]asef.a-star.edu.sgasef.a-star.edu.sg
  3. [3]waferpedia.comwaferpedia.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]Equipment inventory listing