Comparison ledger
Hitachi 1305 BSG 3, Tousimis Automegasamdri 915B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | Automegasamdri 915BTousimis |
|---|---|---|
| OEM | Hitachi | Tousimis |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Tousimis Automegasamdri 915B |
| Specifications | ||
| Equipment type | — | Critical point dryer[1] |
| Process mode | — | Samples are dried at the CO2 supercritical point[1] |
| Starting medium | — | Ultra pure ethanol[1] |
| Chamber pressure before opening | — | 0 psi[1] |
| Operation modes mentioned | — | Auto Mode, HEAT, BLEED, VENT, COOL[1] |
| Type | — | Automated critical point drying system[2] |
| Substrate size | — | Up to 150 mm wafer[2] |
| Manufacturer location | — | Rockville, MD, United States[3] |
| Use | — | Drying freshly released structures with minimum sticking issues[1] |
| Drying medium | — | CO2 at the supercritical point[1] |
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