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Comparison ledger

1305 BSG 3versusMP 30 Wet Process

Hitachi 1305 BSG 3, SCREEN MP 30 Wet Process, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
OEMHitachiSCREEN
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3SCREEN MP 30 Wet Process
Specifications
Manufacturer—SCREEN[1]
Model—MP 30[1]
Equipment name—MP 30 Wet Process[2]
Category—Wet Processing / Clean[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com