Comparison ledger
Hitachi 1305 BSG 3, Nordson March AP 600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | March AP 600Nordson |
|---|---|---|
| OEM | Hitachi | Nordson |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Nordson March AP 600 |
| Specifications | ||
| Manufacturer | — | Nordson[1] |
| Model | — | AP 600[2] |
| Type | — | Plasma Cleaner[2] |
| Category | — | Wet Processing / Clean[1] |
| Enclosure dimensions (W x D x H) | — | 569 x 869 x 704 mm (22 x 34 x 28 in.)[3] |
| Net weight | — | 221 kg (487 lbs)[3] |
| Chamber maximum volume | — | 50.4 liters (3076 in³)[3] |
| Number of electrode positions | — | 7[3] |
| RF power standard wattage | — | 600 W[3] |
| Frequency | — | 13.56 MHz[3] |
| Control system | — | EPC control with touchscreen interface[3] |
| Remote interface | — | PlasmaLINK, ProcessLINK[3] |
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