Comparison ledger
Heller 2043MK5-VR, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2043MK5-VRHeller | |
|---|---|---|
| OEM | Heller | Varian |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Heller 2043MK5-VR | Varian 0332 F 9453 302 Diffusion |
| Specifications | ||
| Oven length | 680 cm[1] | — |
| Process gas options | Air, Nitrogen, Formic Acid, forming gas[1] | — |
| Heated zones | Convection: 10 Top / 10 Bottom; IR: 3 Top[1] | — |
| Heated length (convection/total) | 327 cm / 430 cm[1] | — |
| Cool zones | 3 Top (Bottom Option)[1] | — |
| Max working temperature (convection / IR) | Standard: 350°C / 400°C; Option: 400°C / 480°C[1] | — |
| Min vacuum | Standard: 10 Torr; Option: <10 Torr[1] | — |
| Max board size | 500 mm (L) x 450 mm (W) x 29 mm (H)[1] | — |
| Cleanroom option | Down to Class 1000[1] | — |
| Heated zones (convection) | 10 top / 10 bottom[1] | — |
| Heated zones (IR) | 3 top[1] | — |
| Heated length (convection) | 327 cm[1] | — |
| Heated length (total) | 430 cm[1] | — |
| Cooling rate | >3°C/sec[1] | — |
| Max working temperature (convection / IR) standard | 350°C / 400°C[1] | — |
| Max working temperature (convection / IR) option | 400°C / 480°C[1] | — |
| Min vacuum standard | 10 Torr[1] | — |
| Min vacuum option | <10 Torr[1] | — |
| Asset Number | — | 142841[2] |
| Last Confirm Date | — | October 14, 2025[3] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →