Comparison ledger
Headway 1 EC 101 R 485 Photoresist Spinner, SUSS MicroTec Delta 80 Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Delta 80 SpinSUSS MicroTec | |
|---|---|---|
| OEM | Headway | SUSS MicroTec |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Headway 1 EC 101 R 485 Photoresist Spinner | SUSS MicroTec Delta |
| Specifications | ||
| Vacuum requirement | 23" Hg[1] | — |
| Electrical | 115 V, 3 A, 50/60 Hz, 1 Ø (single phase)[1] | — |
| Electrical power | 115 V, 3 A, 50/60 Hz, 1 Ø (single phase)[1] | — |
| Phase | — | 3 Phase + N + PE[2] |
| Voltage | — | 400 V, 50 Hz[2] |
| Configuration | — | Software is not included[2] |
Plan your fab
Building a Resist Processing process? Get a complete equipment list.
Open the fab equipment planner →