Comparison ledger
Filmetrics R50, KLA P-15, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | R50Filmetrics | P-15KLA |
|---|---|---|
| OEM | Filmetrics | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics R50 | KLA P-15 |
| Specifications | ||
| Default configuration | configured by default for metallic layers[1] | — |
| Default sample thickness | 525 um +/- 25 um[1] | — |
| Equipment section | Metrology[1] | — |
| Related equipment on same page group | AIT CMT-SR2000N 4-Point Probe Measurement System; MPI TS150 Probe Station[1] | — |
| Measurement type | 4-point probe[1] | — |
| Default material | metallic layers[1] | — |
| Sample table | — | 200 mm sample table with vacuum[2] |
| Measurement range | — | Measures steps from 100 Å to 300 µm[2] |
| Maximum sample thickness | — | 20 mm[2] |
| Minimum sample length | — | 25 mm[2] |
| Tool type | — | Profilometer[3] |
| Measurement capabilities | — | Measures roughness, waviness, step height, and other surface characteristics[4] |
| Wafer capability | — | Up to 8"/200mm wafer capable[4] |
| Control platform | — | Windows NT[4] |
| Software version | — | Profiler v6.41[4] |
| Automation | — | Computer controlled; automatic measurement capability[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →