Waferpedia

Comparison ledger

Profilm3Dversus0020 Contour Projector

Filmetrics Profilm3D, OGP 0020 Contour Projector, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Profilm3DFilmetrics
OEMFilmetricsOGP
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyFilmetrics Profilm3DOGP (Optical Gaging Products) 0020 Contour Projector
Cited variants
  • Profilm3D-200[1]
—
Specifications
manufacturerFilmetrics[2]—
modelProfilm3D[2]—
instrument typeoptical profiler[2]—
measurement methodprofilometry[2]—
step-height accuracy0.7% for an 8 µm step[2]—
maximum silicon thickness stated on source page for tabletop/mapping/production systemsup to 2 mm thick[2]—
Configuration—50-60 Cycle[3]
Voltage—115 V[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]kla.comkla.com
  2. [2]web.archive.orgweb.archive.org
  3. [3]inventory listing