Waferpedia

Comparison ledger

Geminiversus10100

EV Group Gemini, West Bond 10100, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
GeminiEV Group
10100West Bond
OEMEV GroupWest Bond
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEV Group GeminiWest Bond 10100
Cited variants—
Specifications
Bond force (300 mm GEMINI)up to 350 kN[2]—
Bond force (200 mm GEMINI)up to 100 kN[2]—
Overpressure capability (300 mm GEMINI)up to 2000 mbar[2]—
Overpressure capability (200 mm GEMINI)up to 3000 mbar[2]—
Wafer sizes (200 mm GEMINI)100 mm to 200 mm[2]—
Wafer sizes (300 mm GEMINI)200 mm to 300 mm[2]—
Max number of bond chambersup to 4 bond modules[2]—
Pre-process modules (200 mm GEMINI)up to 4 pre-process modules[2]—
Pre-process modules (300 mm GEMINI)2 to 6 pre-process modules[2]—
Load ports (200 mm GEMINI)EVG load ports or SMIF load ports[2]—
Load ports (300 mm GEMINI)FOUP load ports (optional adapter for 200 mm substrates)[2]—
Bond alignment systemField-proven SmartView® bond alignment system[2]—
Wafer-to-wafer alignment accuracy (GEMINI FB)sub 50 nm[1]—
Max number of process modules (GEMINI FB)6 + SmartView® NT[1]—
Wafer diameter (GEMINI FB)200, 300 mm[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]evgroup.comevgroup.com
  2. [2]evgroup.comevgroup.com