Waferpedia

Comparison ledger

200 Cleaningversus1300 Series Safety

Electrovert 200 Cleaning, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
200 CleaningElectrovert
1300 Series SafetyThermo Fisher
OEMElectrovertThermo Fisher
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2026 Third-party support only
Control system——
Generation——
FamilyElectrovert 200 CleaningThermo Fisher 1300
Specifications
Configuration—Class II[1]
Cabinet type—Class II, Type A2 biological safety cabinet[2]
Airflow compensation—SmartFlow airflow compensation system[2]
Motors—Dual DC motors[2]
Front window design—SmartClean front window design[2]
Control panel—Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[2]
UV light—Programmable UV light[2]
SmartPort—SmartPort convenience for routing tubing and cables through the side walls[2]
Available widths—3-foot, 4-foot, 5-foot, and 6-foot sizes[2]
Front opening choices—8-inch or 10-inch front opening[2]
Filter specification—H14 HEPA filters, EN 1822, 99.995% @ MPPS[3]
Certification—NSF/ANSI 49, UL, CE[3]
Service valves—Up to 6 total, 3 on each side wall[3]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]thermofisher.comthermofisher.com
  3. [3]documents.thermofisher.comdocuments.thermofisher.com