Waferpedia

Comparison ledger

XDS 35 iversus-Mist 850 Electronic Air Filter

Edwards XDS 35 i, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
XDS 35 iEdwards
OEMEdwardsTri
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEdwards XDSTri -Mist 850 Electronic Air Filter
Cited variants—
Specifications
Configuration1750 rpm[2]—
Power520W (0.7hp)[2]—
Typedry scroll vacuum pump[1]—
Peak pumping speed35 m3/h (21 cfm)[1]—
Ultimate vacuum0.01 mbar (0.008 Torr)[1]—
Nominal rotation speed1750 rpm[1]—
Motor power520 W[1]—
Power at ultimate440 W[1]—
Supply voltage100-120/200-240 V (+/- 10%)[1]—
Supply frequency50/60 Hz[1]—
Weight48 kg (105 lb)[1]—
Inlet connectionNW40[1]—
Exhaust connectionNW25[1]—
Noise level at ultimate57 dB(A)[1]—
Operating temperature range5 to 40 C (41 to 104 F)[1]—
Product formoil-free dry scroll vacuum pump[4]—

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]edwardsvacuum.comedwardsvacuum.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]idealvac.comidealvac.com