Comparison ledger
Edwards EPX 180 NE, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EPX 180 NEEdwards | 160 XPVarian |
|---|---|---|
| OEM | Edwards | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2008 Vintage year | — |
| Control system | — | — |
| Generation | — | — |
| Family | Edwards EPX 180 NE | Varian 160 XP |
| Cited variants | — |
|
| Specifications | ||
| Pumping speed | 106 CFM[2] | — |
| Ultimate vacuum | < 7 x 10^-5 Torr[2] | — |
| Inlet | ISO63[2] | — |
| Exhaust | KF25[2] | — |
| Weight | 104 lbs[2] | — |
| Voltage | 200/208V[3] | — |
| Frequency | 50/60 Hz[3] | — |
| Current | 16 Amps[3] | — |
| Display and control panel | Integrated[3] | — |
| Gas purge | High temperature gas purge assembly[3] | — |
| Mounting | Metric eyebolt / heavy duty mount base[3] | — |
| Configuration (160 XP Ion variant) | — | 150mm High Current IMP[1] |
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