Waferpedia

Comparison ledger

F DFP 8160 Fully Automatedversus120 Continuous

Disco F DFP 8160 Fully Automated, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMDiscoLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco F DFP 8160 Fully AutomatedLapmaster 120 Continuous
Specifications
Voltage200VAC - 3 Phase[1]—
50/60Hz, Full Load Amps57A[1]—
Spindle Max. Revolution3000min.[1]—
Air0.5MPa.[1]—
Configuration550L/min(ANR)[1]—
Cutting Water0.3MPa. 20L/min[1]—
Cooling Water0.2MPa. 4Lmin[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing