Comparison ledger
Disco DFP 8160 Fully Automated, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 ContinuousLapmaster | |
|---|---|---|
| OEM | Disco | Lapmaster |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DFP 8160 Fully Automated | Lapmaster 120 Continuous |
| Specifications | ||
| Manufacturer | Disco[1] | — |
| Model | DFP 8160[1] | — |
| Tool type | Fully automated polisher[1] | — |
| Category | CMP[2] | — |
| Wafer size | 8-inch to 12-inch wafers[3] | — |