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Comparison ledger

SQ3000-CMMversus05 LHP 151

CyberOptics SQ3000-CMM, Melles Griot 05 LHP 151, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SQ3000-CMMCyberOptics
05 LHP 151Melles Griot
OEMCyberOpticsMelles Griot
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCyberOptics SQ3000-CMMMelles Griot 05
Cited variants—
Specifications
Inspection speedStandard MRS Sensor: 40 cm²/sec (2D+3D); High-Speed MRS Sensor: 50 cm²/sec (2D+3D); High-Resolution MRS Sensor: 20 cm²/sec (2D+3D); Ultra-High Resolution MRS Sensor: 15 cm²/sec (2D+3D)[1]—
Field of view (FOV)Standard MRS Sensor: 36 x 30 mm; High-Speed MRS Sensor: 36 x 36 mm; High-Resolution MRS Sensor: 26 x 26 mm; Ultra-High Resolution MRS Sensor: 21 x 21 mm[1]—
Coordinate measurement capabilityLine / Distance / X,Y / Mid Line, Inter Point / Regression Shifted, Datum X,Y / LSF X,Y Offset, X,Y Offset / Value / Location / List of X,Y Values, Height / Local Height / Regression Radius, Coplanarity / Distance to plane / 2nd Order fitting, Difference / Absolute / 2sqrt / VC, Max / Min / Ave / Sigma / Plus / Minus / Multiple[1]—
X Y resolutionStandard MRS Sensor and High-Speed MRS Sensor: 10µm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 7µm[1]—
Z resolution0.5µm[1]—
Accuracy XYStandard MRS Sensor and High-Speed MRS Sensor: 6µm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 5µm[1]—
Accuracy Z2 μm[1]—
Minimum feature sizeStandard MRS Sensor and High-Speed MRS Sensor: 100µm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 70µm[1]—
Maximum feature sizeSQ3000: 510 x 510 mm (20 x 20 in.); SQ3000-X: 710 x 610 mm (27.9 x 24 in.)[1]—
Minimum feature height50 μm[1]—
Maximum feature heightStandard MRS Sensor and High-Speed MRS Sensor: 24mm; High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 8mm[1]—
SoftwareCyberCMM[2]—
TechnologyMRS technology / MRS-enabled technology[2]—
Product typeCoordinate Measurement Applications[2]—
Use caseMetrology applications in PCB, semiconductor, and consumer electronics manufacturing[2]—
Measurement capabilitiesCoplanarity, distance, height, and datum X,Y[2]—
Setup timeLess than an hour for programming complex applications[2]—
Multi-process capabilityAOI, SPI, AOM, CMM[2]—
Field of view36 x 30 mm; 36 x 36 mm; 26 x 26 mm; 21 x 21 mm depending on MRS sensor[1]—
Configuration—With 05 LPL 340 Power Supply (Does not power on)[3]
Equipment type—Laser[3]
Make—Melles Griot[3]
Model—05 LHP 151[3]
Power state—Does not power on[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com