Waferpedia

Comparison ledger

CST 55 2 BCDS Chemical Deliveryversus003163-000 SRD

Chemical Safety Technology CST 55 2 BCDS Chemical Delivery, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
CST 55 2 BCDS Chemical DeliveryChemical Safety Technology
OEMChemical Safety TechnologySemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyChemical Safety Technology CST 55 2 BCDS Chemical DeliverySemitool 003163-000 SRD
Specifications
ConfigurationDual-drum[1]—
PhaseSingle Phase, 50/60 Hz, 120 V[1]—
MakeChemical Safety Technology[1]Semitool[3]
ModelCST 55 / 2 BCDS[1]003163-000[3]
CategoryWet Processing / Clean[2]—
Typechemical delivery system[1]—
Accessglovebox access[1]—
ChemicalKOH / Potassium Hydroxide[1]—
PowerSingle Phase, 50/60 Hz, 120 V[2]—
Equipment type—Spin Rinse Dryer (SRD)[3]
Asset #—139375[3]
Last Confirm Date—September 03, 2025[3]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing