Waferpedia

Comparison ledger

1000 Hot PlateversusHMDS1

CEE 1000 Hot Plate, YES HMDS1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateYES HMDS1
Specifications
Configuration4"[1]—
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Model—YES HMDS1[2]
Equipment type—Oven[3]
Section—Lithography[3]
Name as listed on equipment page—YES HMDS1 Oven[3]
Serial number—87297[2]
Tool owner—Brian Baker[2]
Tool designation—YES HMDS1[2]
Location—Bay C[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]nanofab.utah.edunanofab.utah.edu