Waferpedia

Comparison ledger

1000 Hot PlateversusATS 195 V LN 2

CEE 1000 Hot Plate, Thermotron ATS 195 V LN 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
ATS 195 V LN 2Thermotron
OEMCEEThermotron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateThermotron ATS 195
Specifications
Configuration4"[1]Hot & Cold[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Manufacturer—Thermotron[2]
Model—ATS 195 V LN 2[3]
Category—Thermal / Diffusion[2]
Equipment type—Vertical Thermal Shock Chamber[4]
LN2 capability—LN2[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]thermotron.comthermotron.com