Waferpedia

Comparison ledger

1000 Hot PlateversusSC12.5R

CEE 1000 Hot Plate, Mellen SC12.5R, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SC12.5RMellen
OEMCEEMellen
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateMellen SC12.5R
Specifications
Configuration4"[1]—
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Equipment type—Three zone tube furnace[2]
Operation—Each capable of independent operation[2]
Quantity listed—2[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]cnsi.ucsb.educnsi.ucsb.edu