Waferpedia

Comparison ledger

11000versusVLR

Cascade Microtech 11000, Plasma-Therm VLR, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11000Cascade Microtech
VLRPlasma-Therm
OEMCascade MicrotechPlasma-Therm
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCascade Microtech 11000Plasma-Therm VLR
Specifications
ConfigurationWith antivibration table[1]With PECVD Module System & disconnected box[3]
Make—Plasmatherm[3]
Model—VLR[3]
Asset description—Plasmatherm VLR Handler - With PECVD Module System & disconnected box[3]
Related process-control reference—Unaxis VLR Dep / Unaxis VLR Etch[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu