Comparison ledger
Canon FPA 5510 iZ i-Line, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 5510 iZ i-LineCanon | 1000 FamilyUltratech |
|---|---|---|
| OEM | Canon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 5510 | Ultratech 1000 Family |
| Specifications | ||
| Configuration | Wide-Field[1] | — |
| Wafer Size | 12 inch (300 mm)[1] | — |
| Type | i-Line Stepper[1] | — |
| Field | Wide-Field[1] | — |
| Wafer size | 12 inch[2] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[3] |
| Optical design | — | Wynne Dyson[3] |
| Magnification | — | 1X[3] |
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