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FPA 5500 iZ+ i-Lineversus150 e Mask

Canon FPA 5500 iZ+ i-Line, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
FPA 5500 iZ+ i-LineCanon
150 e MaskSUSS MicroTec
OEMCanonSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCanon FPA 5500SUSS MicroTec 150 e Mask
Cited variants
  • FPA 5500 iZ+ i-Line Stepperi-line[1]
  • FPA 5500 iZi-line[2]
  • FPA 5500 iZ i-Line[2]
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Specifications
Configuration350nm[2]—
MakeCanon[1]—
ModelFPA 5500 iZ+[1]—
TypeStepper[1]—
i-LineYes[1]—
Wafer Sizes12 inch[3]—
Vintage2004[1]—
FPA 5500 iZ+ i-Line entry150 e Mask entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing