Comparison ledger
Canon FPA 3030 i 5 + i-Line, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | |
|---|---|---|
| OEM | Canon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 3030 i 5 + i-Line | Ultratech 1000 Family |
| Specifications | ||
| Make | Canon[1] | — |
| Model | FPA 3030 i 5 +[1] | — |
| Full Name | Canon FPA 3030 i 5 + i-Line Stepper[1] | — |
| Type | Stepper[1] | — |
| Wafer Size | 6 inch[1] | — |
| Asset Number | 152933[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[2] |
| Optical design | — | Wynne Dyson[2] |
| Magnification | — | 1X[2] |
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