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Comparison ledger

49 7211versus100R16

Buehler 49 7211, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
49 7211Buehler
100R16Strasbaugh
OEMBuehlerStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler 49 7211Strasbaugh 100R16
Specifications
Phase1 Phase[1]—
Configuration170-264 Vac[1]—
Tool typeChemical mechanical polisher (CMP)[1]—
Electrical phases1 phase[1]—
Input voltage170-264 Vac[1]—
Frequency47/63 Hz[1]—
CategoryCMP[2]—
type—1 spindle grinder/polisher[3]
drive system—DC drive system with 2 motors[3]
spindle RPM—1-180 RPM[3]
eccentric RPM—1-90 RPM[3]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[3]
capacity—16 inches[3]
spindle size—1-8 TPI[3]
overall dimensions—28 inches x 36 inches x 48 inches[3]
weight—500 lbs[3]
origin—made in the USA[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]excelltechnology.comexcelltechnology.com