Comparison ledger
Bruker Jordan Valley JVX 5200 T X-ray Reflectometer, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | Bruker | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker Jordan Valley | KLA .498 PSL Wafer |
| Specifications | ||
| 1 Loadport type | Brooks Series 8, 25 slots, 12 inch[1] | — |
| Configuration | Brooks Robot[1] | NIST Traceable[2] |
| Main-Computer1 | MS Windows XP Prof ver. 2002 SP2[1] | — |
| Operator Software | JVX5200T / 753nEXT Ver.1.9.6.1[1] | — |
| MCD Computer | Microsoft Windows 98 2nd Edition 4.10.2222A[1] | — |
| JVXXR Computer | MS Windows 2000 SP4[1] | — |
| Running processes | JVXrrs, run process[1] | — |
| Measurement systems | XRF and XRR[1] | — |
| Loadport | Brooks Series 8, 25 slots, 12 inch[1] | — |
| Robot | Brooks[1] | — |
| Cooling system | Cryo Tiger[1] | — |
| Small spot XRF | Yes (energy dispersive)[1] | — |
| CE Mark | Yes[1] | — |
| Operating system | Windows XP, Windows 98, Windows 2000[1] | — |
| NIST traceability | — | Yes[2] |
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