Comparison ledger
Bruker Dimension Icon, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Dimension IconBruker | |
|---|---|---|
| OEM | Bruker | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker Dimension Icon | KLA .498 PSL Wafer |
| Cited variants |
| — |
| Specifications | ||
| XYZ Scan Range | 90 μm x 90 μm x 10 μm (typical)[2] | — |
| Maximum Imaging Area | 100 μm x 100 μm[3] | — |
| Maximum Feature Height | 2 μm[3] | — |
| Z-Axis Noise | Sub-angstrom range[4] | — |
| XY Noise | Angstroms[4] | — |
| Drift Rate | <200 pm[4] | — |
| Sample Diameter (Max) | 210 mm[2] | — |
| Sample Thickness (Max) | 15 mm[2] | — |
| Optics | 5-Megapixel digital camera; 180–1465 μm viewing area[2] | — |
| Controller | NanoScope 6[4] | — |
| Software | ScanAsyst Plus[4] | — |
| Configuration | — | NIST Traceable[5] |
| NIST traceability | — | Yes[5] |
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