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ContourGT X 3 D Optical ProfilerversusProfilm3D

Bruker ContourGT X 3 D Optical Profiler, Filmetrics Profilm3D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: Precision Optics, Unknown[1]
Side-by-side comparison of selected equipment models
Attribute
Profilm3DFilmetrics
OEMBrukerFilmetrics
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruker ContourGT X 3 D Optical ProfilerFilmetrics Profilm3D
Cited variants—
  • Profilm3D-200[2]
Specifications
ConfigurationSingle Phase[1]—
Full Load Power400 VA[3]—
AC Input115/230 V[3]—
ManufacturerBruker[3]—
CategoryPrecision Optics[3]—
Electrical configurationSingle Phase[3]—
Frequency50/60 Hz[3]—
Vintage2022[1]—
manufacturer—Filmetrics[4]
model—Profilm3D[4]
instrument type—optical profiler[4]
measurement method—profilometry[4]
step-height accuracy—0.7% for an 8 µm step[4]
maximum silicon thickness stated on source page for tabletop/mapping/production systems—up to 2 mm thick[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]kla.comkla.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]web.archive.orgweb.archive.org