Waferpedia

Comparison ledger

contour-R1versus0020 Contour Projector

Bruker contour-R1, OGP 0020 Contour Projector, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBrukerOGP
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruker contour-R1OGP (Optical Gaging Products) 0020 Contour Projector
Specifications
Equipment typeOptical Profiler[1]—
Equipment identifierInert-BRUKER-contour-R1[1]—
Measurement principleOptical (non-contact) 3D surface characterization; uses interference microscopy[2]—
Vertical resolution (VSI mode)~3 nm[2]—
Vertical resolution (PSI mode)<0.1 nm[2]—
Max. sample height100 mm[2]—
Max. sample diameter150 mm[2]—
Max. single measurement area1.0 mm x 1.0 mm (with stitching for larger areas)[2]—
Measurement modesVertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI)[2]—
Objectives10X and 50X on a software controlled motorized turret[2]—
Field of view (FOV) lens0.55X and 2X[2]—
Stage typeMotorized X-Y stage[2]—
SoftwareVision64 for automation and analysis[2]—
Additional capabilitiesStitching algorithm for combining multiple images; handles rough surfaces, abrupt steps, slopes >60°, and low reflectance <0.5%[2]—
VendorBruker[2]—
ModelContour Elite I 3D optical metrology system[2]—
PurposeOptical (non-contact) 3D surface characterization of a wide range of substrates and devices[2]—
DescriptionOptical profiler capable of generating three dimensional surface scans of a wide range of materials and devices[2]—
StageMotorized X-Y stage positioning[2]—
Maximum sample size150 mm diameter[2]—
Maximum sample height100 mm[2]—
FOV lenses0.55X and 2X[2]—
Configuration—50-60 Cycle[3]
Voltage—115 V[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]uwaterloo.cauwaterloo.ca
  2. [2]uwaterloo.cauwaterloo.ca
  3. [3]inventory listing