Comparison ledger
Bruker contour-R1, Melles Griot 05 LHP 151, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | contour-R1Bruker | 05 LHP 151Melles Griot |
|---|---|---|
| OEM | Bruker | Melles Griot |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Bruker contour-R1 | Melles Griot 05 |
| Specifications | ||
| Equipment type | Optical Profiler[1] | Laser[3] |
| Equipment identifier | Inert-BRUKER-contour-R1[1] | — |
| Measurement principle | Optical (non-contact) 3D surface characterization; uses interference microscopy[2] | — |
| Vertical resolution (VSI mode) | ~3 nm[2] | — |
| Vertical resolution (PSI mode) | <0.1 nm[2] | — |
| Max. sample height | 100 mm[2] | — |
| Max. sample diameter | 150 mm[2] | — |
| Max. single measurement area | 1.0 mm x 1.0 mm (with stitching for larger areas)[2] | — |
| Measurement modes | Vertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI)[2] | — |
| Objectives | 10X and 50X on a software controlled motorized turret[2] | — |
| Field of view (FOV) lens | 0.55X and 2X[2] | — |
| Stage type | Motorized X-Y stage[2] | — |
| Software | Vision64 for automation and analysis[2] | — |
| Additional capabilities | Stitching algorithm for combining multiple images; handles rough surfaces, abrupt steps, slopes >60°, and low reflectance <0.5%[2] | — |
| Vendor | Bruker[2] | — |
| Model | Contour Elite I 3D optical metrology system[2] | 05 LHP 151[3] |
| Purpose | Optical (non-contact) 3D surface characterization of a wide range of substrates and devices[2] | — |
| Description | Optical profiler capable of generating three dimensional surface scans of a wide range of materials and devices[2] | — |
| Stage | Motorized X-Y stage positioning[2] | — |
| Maximum sample size | 150 mm diameter[2] | — |
| Maximum sample height | 100 mm[2] | — |
| FOV lenses | 0.55X and 2X[2] | — |
| Configuration | — | With 05 LPL 340 Power Supply (Does not power on)[3] |
| Make | — | Melles Griot[3] |
| Power state | — | Does not power on[3] |
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