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017-0146-01 PrealignerversusMA 150 M EL MA Mask

Brooks 017-0146-01 Prealigner, SUSS MicroTec MA 150 M EL MA Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
MA 150 M EL MA MaskSUSS MicroTec
OEMBrooksSUSS MicroTec
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1993 Vintage year
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerSUSS MicroTec MA 150
Specifications
Voltage—220V[1]
Configuration—1800 VA[1]
Frequency—60 Hz[1]
Wafer Size—6 inch[1]
Power—1800 VA[1]
017-0146-01 Prealigner entryMA 150 M EL MA Mask entryAsk about these tools →Share experience with this comparison →

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing