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017-0146-01 PrealignerversusNSR S 208 D KrF Scanner KrF

Brooks 017-0146-01 Prealigner, Nikon NSR S 208 D KrF Scanner KrF, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
NSR S 208 D KrF Scanner KrFNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon NSR S 208 D KrF Scanner KrF
Specifications
Illumination Source—KrF[1]
Type—Scanner / Stepper[1]
Wafer Size—12 inch[1]
Vintage—2011[1]
017-0146-01 Prealigner entryNSR S 208 D KrF Scanner KrF entryAsk about these tools →Share experience with this comparison →

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing