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017-0146-01 PrealignerversusNSR S 207 D

Brooks 017-0146-01 Prealigner, Nikon NSR S 207 D, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
NSR S 207 DNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon NSR
Cited variants—
  • NSR S 207 D with Cymer laser[1]
  • NSR S 207 D with Gigaphoton laser[2]
  • NSR S 207 D with G41K2 Gigaphoton laser[3]
  • NSR S 207 D machine only[4]
  • Nikon NSR S 207 D with Cymer laser[1]
  • Nikon NSR S 207 D with Gigaphoton laser[2]
  • Nikon NSR S 207 D with Gigaphoton laser (second unit)[5]
  • Nikon NSR S 207 D with G41K2 Gigaphoton laser[3]
Specifications
Configuration—With Cymer laser[1]
Laser source (variant)—Cymer laser[1]
OEM—Nikon[1]
Model—NSR S 207 D[1]
Equipment type—Stepper[1]
Laser—Cymer laser[1]
Vintage—2005[1]
Last Confirm Date—July 20, 2023[4]
017-0146-01 Prealigner entryNSR S 207 D entryAsk about these tools →Share experience with this comparison →

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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing