Waferpedia

Comparison ledger

017-0146-01 PrealignerversusFPA 5500 iZ+ i-Line

Brooks 017-0146-01 Prealigner, Canon FPA 5500 iZ+ i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
FPA 5500 iZ+ i-LineCanon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerCanon FPA 5500
Cited variants—
  • FPA 5500 iZ+ i-Line Stepperi-line[1]
  • FPA 5500 iZi-line[2]
  • FPA 5500 iZ i-Line[2]
Specifications
Configuration—350nm[2]
Make—Canon[1]
Model—FPA 5500 iZ+[1]
Type—Stepper[1]
i-Line—Yes[1]
Wafer Sizes—12 inch[3]
Vintage—2004[1]
017-0146-01 Prealigner entryFPA 5500 iZ+ i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing