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CEE 1100 Large Substrate and Wafer Hot Plateversus120 Automated Coater Processing

Brewer Science CEE 1100 Large Substrate and Wafer Hot Plate, EV Group 120 Automated Coater Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
CEE 1100 Large Substrate and Wafer Hot PlateBrewer Science
120 Automated Coater ProcessingEV Group
OEMBrewer ScienceEV Group
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrewer Science CEEEV Group 120 Automated Coater Processing
Specifications
ConfigurationAccommodates 8" wafers[1]50/60 Hz[2]
Voltage220 V, 2000 W[1]—
Phase—3 Phase[2]
Wafer sizes—6 inch, 8 inch[2]
Frequency—50/60 Hz[2]
Wiring configuration—4 Wire + GND[2]
Vintage—2015[2]
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing