Waferpedia

Comparison ledger

300 X SpinversusGasonics A 1000

Brewer Science 300 X Spin, Lam Research Gasonics A 1000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
300 X SpinBrewer Science
Gasonics A 1000Lam Research
OEMBrewer ScienceLam Research
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrewer Science 300 X SpinLam Research Gasonics
Specifications
P/N901445[1]—
ConfigurationHeavy Duty Drive[1]25 amps[2]
Drive TypeHeavy Duty Drive[1]—
Voltage208-240 V[1]—
Part Number901445[1]—
Phase—3 Phase[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing