Comparison ledger
Blue M 0 V 500, Mattson Millios RTP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | Millios RTPMattson |
|---|---|---|
| OEM | Blue M | Mattson |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Mattson Millios RTP |
| Specifications | ||
| Manufacturer | — | Mattson[1] |
| Model | — | Millios[1] |
| Tool type | — | Rapid Thermal Process (RTP) system[1] |
| Category | — | Thermal / Diffusion[1] |
| Vintage | — | 2011[1] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →