Comparison ledger
Blue M 0 V 500, Hitachi Kokusai DD 823 V Vertical Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 V 500Blue M | |
|---|---|---|
| OEM | Blue M | Hitachi |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 V 500 | Hitachi Kokusai |
| Specifications | ||
| Process | — | H2 Anneal[1] |
| System Layout | — | Main, Utility[1] |
| System Type | — | L Type[1] |
| Configuration | — | No Side Maintenance[1] |
| System Paint Color | — | Ivory[1] |
| Furnace Front Surface Finish | — | Painted[1] |
| Rapid Cooling Unit | — | Not Installed[1] |
| N2 Load Lock | — | Not Installed[1] |
| O2 Analyzer | — | Not Installed[1] |
| Cassette I/O Type | — | SMIF[1] |
| SMIF | — | Asyst / Indexer 2200[1] |
| AVG Compatibility | — | Unable[1] |
| System Main Controller | — | CX 3002 A[1] |
| Mechanical Controller | — | CX 1215-1, 1215-2[1] |
| Sequence Controller | — | CX 1312[1] |
| Gas Controller | — | CX 3201 B[1] |
| Gs Flow Chart Panel | — | Installed (Front)[1] |
| Operational Panel | — | Installed (Front)[1] |
| Signal Tower/ colors | — | Not Installed[1] |
| Furnace Temperature Controller | — | CQ 1600[1] |
| Furnace Over-temp Detector | — | DN 150[1] |
| Gas Detector | — | Riken Keiki GD-V 11 D[1] |
| Detecting Gas | — | H2[1] |
| Host Communications | — | Yes[1] |
| User Host Computer I/F | — | HSMS[1] |
| Process Gas | — | N2, H2[1] |
| Basic Style (Gas System) | — | Integrated Gas System (Fujikin)[1] |
| Wafer Qty in Cassette | — | 26[1] |
| Cassette Storage Qty | — | 24[1] |
| Fork Type | — | 1 + 4 (VAC)[1] |
| Fork-Wafer Presence Sensor | — | Installed[1] |
| Fork-Variable Pitch | — | Installed[1] |
| Wafer size | — | 8 inch[1] |
| Cassette I/O type | — | SMIF with Asyst/Indexer 2200[1] |
| Cassette I/O type (alternative) | — | Normal I/O[2] |
| System main controller (alternative) | — | CX 2003 A[2] |
| Furnace temperature controller (alternative) | — | CQ 1500 A[2] |
| Gas detector | — | Riken Keiki GD-V 11 D (H2)[1] |
| Gas detector (alternative) | — | Riken Keiki GD-D 8 V (H2)[2] |
| Gas system basic style | — | Integrated Gas System (Fujikin)[1] |
| User host computer interface | — | HSMS[1] |
| Wafer quantity per cassette | — | 26[1] |
| Wafer quantity per cassette (alternative) | — | 25[2] |
| Cassette storage quantity | — | 24[1] |
| Cassette storage quantity (alternative) | — | 21[2] |
| Auto wafer aligner | — | Not installed[1] |
| Auto wafer aligner (alternative) | — | Installed[2] |
| Vintage (year) | — | 1997[1] |
| Vintage (year) (alternative) | — | 1995[2] |
| OEM | — | Hitachi Kokusai[1] |
| Model | — | DD 823 V[1] |
| Equipment type | — | Vertical Diffusion Furnace[1] |
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